MC2-CHALMERS: Nanofabrication Laboratory, one of the largest and most modern university clean room facilities in Europe equipped with standard photolithography and two modern e-beam lithography units.
TU-DELFT: Nanofabrication state-of-the-art clean room facility at the Kavli Nanolab for high-resolution electron beam lithography, dry etching and various metals and dielectric depositions systems.
Smaller size nanofabrication facilities are available also at the CNR-SPIN, UCM and CNRS laboratories.